Investigation of Energy Dissipation of Electrons in Al- and Cu-Targets by Monte Carlo Method

Abstract

A couple of formulae for mean ionization potential J in Bethe's expression for stopping power was exemplified as for it's adaptability to calculate the energy loss distribution of electrons and the depth distribution of X-ray production by Monte Carlo Method, which will be significant in the field of scanning electron microscope (SEM) and electron probe microanalyser (EPMA). The contributions of mean ionization potential to the final phenomena such as energy dissipation, backscattering ratio and X-ray production etc. were investigated by simulating them by Monte Carlo calculation and the results were compared with the experiments on the normalized energy loss distribution in silicon oxide reported recently by Hoff and Everhart and on the depth distribution of characteristic X-rays.