Preparation and Properties of Lead Zirconate-Titanate Thin Films
- 1 September 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (9S), 2149-2151
- https://doi.org/10.1143/jjap.30.2149
Abstract
Lead zirconate-titanate (PZT, PbZr x Ti1-x O3, x=0.2-0.9) films with submicron thickness (600-900 nm) were prepared using an rf-magnetron sputtering technique. The crystal structure and the orientation of the films were studied as a function of the substrate temperature. The relationships between electric properties and the film compositions were elucidated. The films of x=0.90 exhibit a large remanent polarization of 46 µC/cm2 and small coercive force of 28 kV/cm. In addition, no fatigue after >1011 cycles under an accelerated bipolar stressing was observed.Keywords
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