Properties of D.C. magnetron-sputtered lead zirconate titanate thin films
- 1 May 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 172 (2), 251-267
- https://doi.org/10.1016/0040-6090(89)90653-6
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- Characterization of Pb(Zr,Ti)O3 thin films deposited from multielement metal targetsJournal of Applied Physics, 1988
- Surface acoustic wave propagation on lead zirconate titanate thin filmsApplied Physics Letters, 1988
- Low-temperature process for the preparation of high T c superconducting thin filmsApplied Physics Letters, 1987
- Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputteringJournal of Applied Physics, 1986
- Preparation of c-axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric propertiesJournal of Applied Physics, 1986
- The thermalization of energetic atoms during the sputtering processJournal of Vacuum Science & Technology A, 1984
- Thermalization of sputtered atomsJournal of Applied Physics, 1981
- A compositional fluctuation and properties of Pb(Zr, Ti)O3Solid State Communications, 1977
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974
- Electrooptic CeramicsPublished by Elsevier ,1974