Hydrogen and fluorine profiles in GdF3 films measured by sputter-induced optical emission
- 15 March 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (6), 381-383
- https://doi.org/10.1063/1.90061
Abstract
The sputter‐induced optical emission technique has been used to study the classical problem of the exchange of fluorine and hydroxyl ions in a solid. The hydroxyl ions were measured in the form of hydrogen atoms and detected by the characteristic hydrogen emission line at 6563 Å while the fluorine atoms were detected at 6902 Å. Measurement of the optical intensities as a function of sputtering time produced the H and F depth profiles in GdF3 films.Keywords
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