Composition control in conducting oxide thin films
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (2), 121-127
- https://doi.org/10.1016/0040-6090(82)90610-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The application of ion plating to the continuous coating of flexible plastic sheetThin Solid Films, 1981
- Deposition of transparent heat-reflecting coatings of metal oxides using reactive planar magnetron sputtering of a metal and/or alloyThin Solid Films, 1981
- Preparation of Sn-doped In2O3 (ITO) films at low deposition temperatures by ion-beam sputteringApplied Physics Letters, 1979
- Effect of O2 pressure during deposition on properties of rf-sputtered Sn-doped In2O3 filmsApplied Physics Letters, 1977