High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range
- 1 April 1982
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 76 (7), 3414-3421
- https://doi.org/10.1063/1.443465
Abstract
High resolution infrared absorption and emission spectra have been obtained from an electrical discharge in silane. In addition to extracting vibrational and rotational temperatures for silane itself, emission from the ground electronic state of the free radical SiH is observed and vibrational and rotational temperatures of 2000 and 485 K determined.Keywords
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