Deposition of n-type germanium films by asymmetric A. C. Sputtering
- 1 August 1969
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 4 (2), 81-86
- https://doi.org/10.1016/0040-6090(69)90039-x
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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