Strong piezoelectricity in nanosized silicon nitride prepared by laser-induced chemical vapor deposition
- 18 January 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (3), 321-322
- https://doi.org/10.1063/1.108946
Abstract
It has been found for the first time that laser‐induced chemical vapor deposition (LICVD) processed nano‐Si3N4 possesses strong piezoelectric effects. The piezoelectricity of LICVD nano‐Si3N4 stems from the charge accumulation in the interfaces and the surfaces of microvoids.Keywords
This publication has 2 references indexed in Scilit:
- Sinterable Ceramic Powders from Laser-Driven Reactions: I, Process Description and ModelingJournal of the American Ceramic Society, 1982
- Structure characterization of CVD amorphous Si3N4 by pulsed neutron total scatteringJournal of Non-Crystalline Solids, 1979