Abstract
The transition temperatures (Tt) and heats of crystallization (ΔH) of a‐Ge, a‐Si, and a‐Ge1−xSix films deposited by rf sputtering have been measured by differential scanning calorimetry (DSC). Both Tt and ΔH (per gram) increase linearly with x in the alloy system. Overlapping exothermic multiple peaks are observed in the DSC traces of a‐Ge and a‐Si samples prepared at high deposition rates, suggesting that multiple amorphous configurations may coexist in these materials.