Frequency dependence of thermal excitation of micromechanical resonators
- 31 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3), 685-689
- https://doi.org/10.1016/0924-4247(91)87071-a
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Performance of thermally excited resonatorsSensors and Actuators A: Physical, 1990
- Electrothermally excited silicon beam mechanical resonatorsElectronics Letters, 1987
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968