Performance of thermally excited resonators
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 352-356
- https://doi.org/10.1016/0924-4247(90)85070-k
Abstract
No abstract availableKeywords
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- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968