The influence of antenna configuration and standing wave effects on density profile in a large-area inductive plasma source
Open Access
- 1 May 2000
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 9 (2), 210-218
- https://doi.org/10.1088/0963-0252/9/2/315
Abstract
No abstract availableKeywords
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