Model and measurements for a planar inductive oxygen discharge

Abstract

For a planar inductive oxygen discharge, a global (volume-averaged) discharge model is applied to relate the electron and ion densities and the electron temperature to the neutral gas pressure in the range 2-60 mTorr and power in the range 10-1000 W. A simplified global model is developed, assuming the dominant neutral species is atomic oxygen, and compared to the more complete model. The effective collision frequency is determined in terms of electron-neutral, electron-ion and anomalous (stochastic) collisions and the relative importance of each mechanism is found. The plasma impedance, including the plasma resistance and the electron inertia inductance and the electron temperature and electron density predicted by the global model are compared to rf voltage, rf current and Langmuir probe measurements, yielding reasonable agreement.