Performance of W100−xNx diffusion barriers between 〈Si〉 and Cu
- 1 November 1991
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 53, 364-372
- https://doi.org/10.1016/0169-4332(91)90287-t
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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