In process ellipsometer azimuth angle calibration
- 1 December 1976
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 15 (12), 3179-3184
- https://doi.org/10.1364/ao.15.003179
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.This publication has 10 references indexed in Scilit:
- High Precision Alignment Procedure for an EllipsometerApplied Optics, 1974
- Effects of component imperfections on ellipsometer calibrationJournal of the Optical Society of America, 1973
- Calibration of Ellipsometer Divided Circles*Journal of the Optical Society of America, 1971
- Measurement and Correction of First-Order Errors in EllipsometryJournal of the Optical Society of America, 1971
- Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*Journal of the Optical Society of America, 1971
- General Equations of Symmetrical Ellipsometer ArrangementsJournal of the Optical Society of America, 1970
- Analyses and Corrections of Instrumental Errors in EllipsometryJournal of the Optical Society of America, 1970
- Error analysis of angle of incidence measurementsSurface Science, 1969
- Definitions and conventions in ellipsometrySurface Science, 1969
- Ellipsometry Using a Retardation Plate as Compensator*Journal of the Optical Society of America, 1967