A MEMS Reconfigurable DGS Resonator for K-Band Applications
- 7 August 2006
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 15 (4), 756-762
- https://doi.org/10.1109/jmems.2006.876797
Abstract
A MEMS reconfigurable defected-ground-structure (DGS) resonator using two-dimensional (2-D) periodic DGS for coplanar waveguide (CPW) transmission line and RF MEMS series-resistive switches is proposed. The introduced MEMS reconfigurable DGS resonator has approximately a fixed bandwidth of 8.1 GHz over a wideband frequency range (K-band). The proposed structure can be designed easily for other frequency bands by changing the number of unit-cells of the 2-D PDGS. A cascaded two parallel-resonance circuit model for the MEMS reconfigurable DGS resonator has been introduced as well. The equivalent circuit parameters extraction methods have also been derived. Simulations based on the proposed circuit model are in a very good agreement with the electromagnetic (EM) simulations, which suggests that the MEMS reconfigurable DGS resonator is an inductive controlled reconfigured structure. The structure is designed in CPW environment on a high-resistivity silicon substrate. It is therefore suitable for monolithic integration with standard IC processKeywords
This publication has 5 references indexed in Scilit:
- MEMS-based photonic bandgap (PBG) band-stop filterPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2004
- Silicon micromachined RF MEMS resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiPJournal of Micromechanics and Microengineering, 2003
- All-metal high-isolation series and series/shunt MEMS switchesIEEE Microwave and Wireless Components Letters, 2001
- Micromachined devices for wireless communicationsProceedings of the IEEE, 1998