MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP
- 13 June 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (4), S139-S163
- https://doi.org/10.1088/0960-1317/13/4/323
Abstract
No abstract availableThis publication has 48 references indexed in Scilit:
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