Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter
- 21 June 2001
- journal article
- Published by Elsevier in Materials Science and Engineering B
- Vol. 83 (1-3), 42-47
- https://doi.org/10.1016/s0921-5107(00)00794-7
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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