Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscope
- 15 May 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 67 (1-3), 215-219
- https://doi.org/10.1016/s0924-4247(98)00031-4
Abstract
No abstract availableKeywords
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