Optical emission spectroscopy and actinometry in CCl4-Cl2 radiofrequency discharges
- 1 September 1984
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 4 (3), 163-178
- https://doi.org/10.1007/bf00566839
Abstract
No abstract availableKeywords
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