Comparison of Microstructure of Cross-Sectional CoCr Thin Film Specimens Prepared by Fracture, Microtome, and Ion-Beam Thinning Methods
- 1 July 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (7R)
- https://doi.org/10.1143/jjap.25.1128
Abstract
Cross-sectional CoCr thin film specimens prepared by three different methods; fracture, ultra-microtome and ion-beam thinning, are observed by electron microscopes to investigate the differences in the microstructure revealed in the respective micrographs. It is shown that the specimen prepared by the ion-beam thinning method provides most detailed and clear crystallographic features of the film structure.Keywords
This publication has 6 references indexed in Scilit:
- Microstructure and magnetic properties of CoCr thin films formed on Ge layerIEEE Transactions on Magnetics, 1985
- Microstructure of CoCr Thin Films Prepared by SputteringJapanese Journal of Applied Physics, 1985
- Structure Analysis of Oval Defect on Molecular Beam Epitaxial GaAs Layer by Cross-Sectional Transmission Electron Microscopy ObservationJapanese Journal of Applied Physics, 1984
- Film structure and magnetic properties for Co-Cr sputtered filmsIEEE Transactions on Magnetics, 1984
- R.f.-sputtered Co-Cr layers for perpendicular magnetic recording I: Structural propertiesThin Solid Films, 1983
- Co-Cr recording films with perpendicular magnetic anisotropyIEEE Transactions on Magnetics, 1978