Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 699-702
- https://doi.org/10.1016/0022-3093(83)90267-3
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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