Metal–Ferroelectric–Insulator–Semiconductor Memory FET With Long Retention and High Endurance

Abstract

A ferroelectric memory field-effect transistor (FET) with a Pt-SrBi/sub 2/Ta/sub 2/O/sub 9/-Hf-Al-O-Si gate stack was fabricated and its electrical properties were characterized. The insulating and ferroelectric layers were successively deposited by a laser ablation technique. Excellent data retention characteristics were obtained. The drain currents of on- and off-states were measured as a function of time, after /spl plusmn/6 V poling voltage applied to the gate electrode. The current ratio of the on- and off-states was more than 10/sup 6/ even after 12 days. Moreover, after 10/sup 12/ cycles of /spl plusmn/8 V pulses, this ratio was also more than 10/sup 6/.