Transmission sputtering of gold by heavy ions in the lower keV energy region
- 1 January 1974
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 23 (3), 171-180
- https://doi.org/10.1080/00337577408232422
Abstract
Transmission and back-sputtering yields have been measured from epitaxially grown (100) and (111) gold single crystals of 40 A to 400 A thickness, bombarded with Ar+, Kr+ and Xe+ ions in the energy range 250 eV to 8 keV and at target temperatures between 80 K and 400 K. Combined Electron Microscopy and Microprobe Analysis (EMMA) was used to analyse the sputtered material, which was collected on thin carbon fdms substrates, as well as the gold fdms before and after bombardment. Substantial transmission sputtering is found far beyond the predicted range of the random collision cascade. transmission sputtering yields are shown to be consistent with a model assuming channelled ions to be responsible for sputtering beyond the random range, rather than long range focussed collision sequences. The experiment sets an upper limit of about 50 A (or about 17 collision steps) for the range of a (110) focussed collision sequence in gold, which contribute to transmission sputtering in the temperature range investigated.Keywords
This publication has 24 references indexed in Scilit:
- Stereo-electron microscopy of low-energy ion-bombarded goldPhilosophical Magazine, 1973
- Sub-monolayer detection by electron microprobe analysisJournal of Physics D: Applied Physics, 1973
- The direct observation of point defects in irradiated or quenched metals by quantitative field ion microscopyJournal of Physics F: Metal Physics, 1973
- Variation of the sputtering yield of gold with ion doseRadiation Effects, 1973
- Transmission Sputtering of Thin Films by Low-Energy Hydrogen IonsJournal of Applied Physics, 1968
- The penetration of lattice defects in copper and gold foils bombarded with 1–5 keV argon ionsCanadian Journal of Physics, 1968
- Elektronenmikroskopische Untersuchung von Fehlstellen‐agglomeraten in ionenbestrahlten Kupferfolien. I. Analyse von Agglomerattyp und ‐konfigurationPhysica Status Solidi (b), 1967
- Atomic collision sequences in crystals of copper, silver and gold revealed by sputtering in energetic ion beamsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1961
- The ejection of atoms from gold crystals during proton irradiationPhilosophical Magazine, 1959
- Focusing in Collision Problems in SolidsJournal of Applied Physics, 1957