Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process
- 1 February 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 340 (1-2), 1-6
- https://doi.org/10.1016/s0040-6090(98)01370-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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