Static friction of diamond-like carbon film in MEMS
- 31 October 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 35 (1), 45-50
- https://doi.org/10.1016/0924-4247(92)87006-3
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Friction and wear studies on lubricants and materials applicable to MEMSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A study of static friction between silicon and silicon compoundsJournal of Micromechanics and Microengineering, 1992
- Principles in design and microfabrication of variable-capacitance side-drive motorsJournal of Vacuum Science & Technology A, 1990
- Overcoats and Lubrication for Thin Film DisksMRS Bulletin, 1990
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Friction and wear in microfabricated harmonic side-drive motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Influence of exposure to an atmosphere of high relative humidity on tribological properties of diamondlike carbon filmsJournal of Vacuum Science & Technology A, 1989
- Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recordingJournal of Vacuum Science & Technology A, 1987