Adhesion and Dielectric Strength of Ultra-Low Dielectric Constant PTFE Thin Films
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Applications of doping and dedoping of Teflon AF films in microfabrication using KrF and ArF excimer lasersApplied Surface Science, 1990