Domain epitaxial growth of TiN/Si(001), TiN/GaAs(001), and Si/TiN/Si(001) heterostructures by laser physical vapor deposition: Theory and experiment
- 1 September 1994
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 23 (9), 861-874
- https://doi.org/10.1007/bf02655356
Abstract
No abstract availableKeywords
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