Buried Layer Tungsten Deposits In Porous Silicon: Metal Penetration Depth and Film Purity Determinants
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Porosity and Pore Size Distributions of Porous Silicon LayersJournal of the Electrochemical Society, 1987
- LPCVD Tungsten Deposition on Porous Silicon for Formation of Buried ConductorsMRS Proceedings, 1985