Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)
- 23 May 2001
- journal article
- Published by Elsevier in Polymer Testing
- Vol. 20 (6), 693-701
- https://doi.org/10.1016/s0142-9418(01)00005-8
Abstract
No abstract availableKeywords
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