Microlens arrays with spatial variation of the optical functions

Abstract

Direct laser beam writing is a mature technology for the fabrication of continuous-relief micro-optical (diffractive and refractive) lenses and lens arrays having a wide range of different optical design parameters. Whereas most microlens array applications require only one specific element type, some applications can profit from the combination of micro-optical elements having different optical functions in the same array. Lens arrays with a spatial variation of the focal length and beam deflection angle have been fabricated and successfully tested in confocal microscope measurements on non-planar surfaces.