High concentration effects of ion implanted boron in silicon
- 1 May 1980
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 22 (1), 35-38
- https://doi.org/10.1007/bf00897929
Abstract
No abstract availableKeywords
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- Solid Solubilities of Impurity Elements in Germanium and Silicon*Bell System Technical Journal, 1960