X-ray analysis by electron spectroscopy
- 1 January 1977
- journal article
- Published by EDP Sciences in Journal de Physique Lettres
- Vol. 38 (23), 473-476
- https://doi.org/10.1051/jphyslet:019770038023047300
Abstract
By the use of a special arrangement and with the help of the X-ray photoelectric effect, it is possible to measure characteristic X-ray emission lines with an energy resolution of 0.1 eV-1 eV and a spatial resolution of one micron. Light elements can also be detected and applications in electron probe analysis are pointed outKeywords
This publication has 3 references indexed in Scilit:
- Scanning ESCA: A new dimension for electron spectroscopyApplied Physics Letters, 1977
- Microanalyse et microscopie photoélectroniques X: principe et performances prévisiblesRevue de Physique Appliquée, 1975
- Electron Probe MicroanalysisPublished by Elsevier ,1960