Micro-liquid flow sensor
- 1 June 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 45-50
- https://doi.org/10.1016/0924-4247(93)80010-e
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Monolithic flow sensor for measuring millilitre per minute liquid flowSensors and Actuators A: Physical, 1992
- Silicon thermal flow sensorsSensors and Actuators A: Physical, 1992
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987