A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications
- 1 January 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 11 (1), 63-72
- https://doi.org/10.1016/0250-6874(87)85005-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Pyroelectric anemometers: preparation and flow velocity measurementsSensors and Actuators, 1982
- Monolithic integrated direction-sensitive flow sensorIEEE Transactions on Electron Devices, 1982
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978