Dielectric analysis of intergrated ceramic thin film capacitors
- 1 February 1997
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 15 (1-4), 39-51
- https://doi.org/10.1080/10584589708015695
Abstract
The paper presents a survey on the dielectric analysis of integrated ceramic capacitors. The thin film examples are based on high–permittivity paraelectric SrTiO3, solid–solution (Ba,Sr)TiO3, ferroelectric Pb(Zr,Ti)O3, and superparaelectric BaTiO3. The current state of knowledge concerning the temperature dependence, the voltage dependence, and the frequency dependence of the permittivity and the losses is reviewed. The relation of the dielectric properties to the processing and microstructure of the ceramic thin films is outlined. With respect to the understanding of the leakage mechanism, further evidence for a complete depletion of the titanate films is presented and a refined quantitative model of the field dependence is sketched.Keywords
This publication has 32 references indexed in Scilit:
- Measurement of High-Frequency Dielectric Characteristics in the mm-Wave Band for Dielectric Thin Films on Semiconductor SubstratesJapanese Journal of Applied Physics, 1995
- Ferroelectric properties and fatigue of PbZr0.51Ti0.49O3 thin films of varying thickness: Blocking layer modelJournal of Applied Physics, 1994
- Grain Boundary Defect Chemistry of Acceptor‐Doped Titanates: Space Charge Layer WidthJournal of the American Ceramic Society, 1994
- Dielectric dispersion of ferroelectric ceramics and single crystals at microwave frequenciesAnnalen der Physik, 1994
- Dielectric Constant and Leakage Current of Epitaxially Grown and Polycrystalline SrTiO3 Thin FilmsJapanese Journal of Applied Physics, 1993
- Epitaxial Growth of SrTiO3 Films on Pt Electrodes and Their Electrical PropertiesJapanese Journal of Applied Physics, 1992
- SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric PropertiesJapanese Journal of Applied Physics, 1991
- Conduction mechanisms inthin filmsPhysical Review B, 1991
- Dependence of the Crystal Structure on Particle Size in Barium TitanateJournal of the American Ceramic Society, 1989
- Nonlinearity and Microwave Losses in Cubic Strontium-TitanatePhysical Review B, 1961