Reduced damage of electron cyclotron resonance etching by In doping into p-GaN
- 1 December 2000
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 221 (1-4), 350-355
- https://doi.org/10.1016/s0022-0248(00)00712-0
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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