A comparison of r.f. sputtered and plasma polymerized thin films of tetrafluoroethylene
- 1 October 1975
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 29 (2), L43-L45
- https://doi.org/10.1016/0040-6090(75)90187-x
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- The Role of Halogens in the Plasma Polymerization of HydrocarbonsJournal of Macromolecular Science: Part A - Chemistry, 1974
- Plasma Polymerization of Saturated and Unsaturated HydrocarbonsMacromolecules, 1974
- Thin polymer filmsThin Solid Films, 1973
- R.F. sputtering of plasticsThin Solid Films, 1973
- Some characteristics of sputtered polytetrafluoroethylene filmsThin Solid Films, 1972
- Insulator thin films formed by glow discharge and radiation techniquesThin Solid Films, 1969
- The Decompostion of Polytetrafluoroethylene in a Glow DischargeThe Journal of Physical Chemistry, 1967