Failure of aluminium contacts to silicon in shallow diffused transistors
- 1 March 1970
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 9 (2), 187-IN10
- https://doi.org/10.1016/0026-2714(70)90671-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Electromigration in Thin Al FilmsJournal of Applied Physics, 1969
- Stacking Faults in Annealed Silicon SurfacesJournal of Applied Physics, 1969
- Failure modes of integrated circuits and their relationship to reliabilityMicroelectronics Reliability, 1968
- Anodic Processes of Acetate Ion in Methanol and in Glacial Acetic Acid at Various Anode MaterialsJournal of the Electrochemical Society, 1968