Surface Chemical Analysis by Auger Electron Spectroscopy and Appearance Potential Spectroscopy: A Comparison
- 1 November 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 19 (9), 353-356
- https://doi.org/10.1063/1.1653950
Abstract
By direct comparison it is shown that Auger electron spectroscopy (AES) is more sensitive than appearance potential spectroscopy (APS) for the detection of S, C, and O on a Ti film. Similar combined studies of a number of clean films reveal that APS is about equally sensitive to Cr, Ti, Fe, and Ni, but is unable to detect Cu, Ag, or GaAs under the present conditions. The sensitivity of AES to all these materials in bulk form is the same within a factor of 5.Keywords
This publication has 4 references indexed in Scilit:
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- A Soft X-Ray Appearance Potential Spectrometer for the Analysis of Solid SurfacesReview of Scientific Instruments, 1970
- Analysis of Materials by Electron-Excited Auger ElectronsJournal of Applied Physics, 1968
- Use of LEED Apparatus for the Detection and Identification of Surface ContaminantsJournal of Applied Physics, 1967