Integrated micro flow control systems
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 161-167
- https://doi.org/10.1016/0924-4247(90)85031-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Absolute pressure sensors by air-tight electrical feedthrough structureSensors and Actuators A: Physical, 1990
- Normally closed microvalve and mircopump fabricated on a silicon waferSensors and Actuators, 1989
- A gas chromatographic air analyzer fabricated on a silicon waferIEEE Transactions on Electron Devices, 1979