Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding
- 13 June 2007
- journal article
- Published by Springer Nature in Biomedical Microdevices
- Vol. 9 (6), 815-821
- https://doi.org/10.1007/s10544-007-9094-y
Abstract
No abstract availableKeywords
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