Modification of existing apparatus for SIMS in UHV
- 1 August 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (8), 704-708
- https://doi.org/10.1088/0022-3735/8/8/025
Abstract
Describes how an argon ion gun intended for sputter cleaning, and a quadrupole residual gas analyser (QRGA) have been adapted for use in low current, low energy secondary ion mass spectroscopy (SIMS). Minor external modifications including the fitting of a new type of axial electrostatic energy filter in front of the QRGA make secondary ion detection feasible. The spectrometer may be used for surface analysis; secondary ion spectra are presented from stainless steel type 316, and from mica and sapphire.Keywords
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