Chemical effects in ion mixing of transition metals on SiO2
- 15 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 125-129
- https://doi.org/10.1016/0167-5087(83)90790-1
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Ion-beam-induced reactions in metal-semiconductor and metal-metal thin film structuresNuclear Instruments and Methods, 1981
- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- Reaction of thin metal films with SiO2 substratesSolid-State Electronics, 1978