Influence of oxygen plasma treatments on the structural properties of c-Si
- 25 May 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (21), 2683-2685
- https://doi.org/10.1063/1.121098
Abstract
The effects of hydrogen and oxygen plasma treatments on the structural properties of n-type c-Si were examined. Specimens were exposed to either an oxygen or a hydrogen electron-cyclotron-resonance plasma in a temperature range of 240–385 °C. Hydrogenations performed at low temperatures (<300 °C) introduced platelets. On the other hand, oxygen plasma treatments did not result in the formation of platelets. Analysis of O and H concentration depth profiles, measured by secondary-ion-mass spectrometry (SIMS), reveal that O and H migrate with a similar diffusion coefficient of Deff≈1012 cm2 s−1. Moreover, the O concentration exceeds the H concentration by roughly a factor of 2.5. This suggests that one H atom and 2–3 O atoms migrate as a cluster. Furthermore, evidence of deep traps for H and O was found from the SIMS depth profiles.Keywords
This publication has 13 references indexed in Scilit:
- Amorphous {100} platelet formation in (100) Si induced by hydrogen plasma treatmentJournal of Applied Physics, 1997
- Hydrogen-induced platelets in disordered siliconSolid State Communications, 1996
- Hydrogen migration in polycrystalline siliconPhysical Review B, 1996
- Influence of hydrogen and oxygen plasma treatments on grain-boundary defects in polycrystalline siliconApplied Physics Letters, 1994
- Trap-limited hydrogen diffusion ina-Si:HPhysical Review B, 1992
- Hydrogen transport in amorphous siliconPhysical Review B, 1992
- Hydrogen-Induced Platelets in Silicon: Separation of Nucleation and GrowthMaterials Science Forum, 1992
- Low interface state density SiO2 deposited at 300 °C by remote plasma-enhanced chemical vapor deposition on reconstructed Si surfacesJournal of Applied Physics, 1988
- Defects in single-crystal silicon induced by hydrogenationPhysical Review B, 1987
- Effect of heating on dissociation of water vapor in high-frequency plasmas and formation of hydrogen peroxide in a cold trap downstream of the plasmaPlasma Chemistry and Plasma Processing, 1982