AES study of the SiO2/SiC interface in the oxidation of CVD β-SiC
- 31 December 1992
- journal article
- Published by Elsevier in Surface Science
- Vol. 271 (1-2), 237-243
- https://doi.org/10.1016/0039-6028(92)90879-b
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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