Optical constants of palladium silicides measured by a multiple-wavelength ellipsometer

Abstract

The optical absorption and dispersion of as-deposited Pd, ${\mathrm{Pd}}_2$Si, and PdSi are measured by an ellipsometer at wavelengths of 400 to 700 nm. The imaginary part of the refractive index is shown to decrease by a value of 4 from the as-deposited Pd to the high-temperature annealed PdSi. The binding energy of the Pd 3$d_{5/2}$ core electrons shifts by 1.8±0.2 eV as studied by x-ray photoelectron spectroscopy.