Synthesis of carbon-nitride films using a fast-switched dual-source low energy ion beam deposition system
- 1 May 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 90 (1-4), 277-281
- https://doi.org/10.1016/0168-583x(94)95556-5
Abstract
No abstract availableKeywords
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