Construction of silicon nanocolumns with the scanning tunneling microscope
- 24 August 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (8), 925-927
- https://doi.org/10.1063/1.107730
Abstract
Voltage pulses to a scanning tunneling microscope (STM) are used to construct silicon columns of 30–100 Å diameter and up to 200 Å height on a silicon surface and on the end of a tungsten probe. These nanocolumns have excellent conductivity and longevity, and they provide an exceptional new ability to measure the shapes of nanostructures with a STM. This construction methodology and these slender yet robust columns provide a basis for nanoscale physics, lithography, and technology.Keywords
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