Direct writing of 10 nm features with the scanning tunneling microscope
- 5 December 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (23), 2287-2289
- https://doi.org/10.1063/1.100255
Abstract
A scanning tunneling microscope (STM) has been used to write metallic lines and carbon lines with linewidths as small as 10 nm. Organometallic gases or surface organic contamination can be decomposed to deposit these lines in a single step. Computer control of the STM allows precise patterning of these lines on a silicon substrate.Keywords
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